Статья 5509 A.A. Saharian A.S. Kotanjyan A.R. Mkrtchyan B.V. Khachatryan NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 402 162-166 2017 https://www.journals.elsevier.com/nuclear-instruments-and-methods-in-physics-re…